Digital Electronics Scanning Probe Microscope Specifications
Nanoscope IV Controller Dimension 310™ SPM Head
Sample Specifications |
|
|
Max Sample Size |
Wafers and disk media (8-inch dia. X 0.5" thick) |
|
Inspectable Area |
100mm X 125mm typical Includes interchangeable adapters for centering hard disks and removable wafer locating pins. Vacuum pump included. |
|
Small Samples |
Magnetic holder available for mounting small samples on mounting pucks (< 15 mm dia. typ.). |
|
Silicon Wafers |
Silicon-dioxide-coated chuck accommodates 2-inch, 100, 125, 150, and 200 mm wafers |
|
Wet Samples |
Optional fluid cell allows immersion of microscope head to max depth of 7 mm. |
|
Chuck Vacuum |
The chuck vacuum pneumatics secure samples to the chuck using a separate toggle switch at the front of the stage control electronics box. |
Scanner Tube Piezo Tube Specifications |
|
|
Travel (approximate scan size) |
|
|
x-axis |
90 μm |
|
y-axis |
90 μm |
|
z-axis |
6 μm |
|
Electronic Resolution |
16-bit (all axes) |
|
Orthogonality |
2 degrees |
|
Uncorrected Z bow |
|
|
90 μm scan size |
50nm |
|
10 μm scan size |
2 nm |
Integrated zoom optical microscope's features include: |
|
|
10x objective (long working distance) |
|
|
2X TV camera tube |
|
|
Motorized zoom system |
|
|
410-1845 x magnification range with 13-inch monitor and corresponding field of view of 180-810 μm |
|
|
Motorized focus |
|
|
Through-the-lens illumination |
|
|
Color Video Camera |
|
|
Focus tracking and automated engagement |
|
|
Noise- <0.5 ÅRMS in vertical (Z) dimension with acoustic/vibration isolation |
|
Stage |
|
Enhanced motorized positioning |
|
125 x 100 mm inspectable area |
|
2 μm resolution |
|
3 μm repeatability unidirectional (10 μm max) |
|
4 μm repeatability bidirectional for X-axis, 6 μm for Y-axis |
Analysis Techniques Available |
|
|
Analyze |
Modify |
|
Autocovariance |
Clean Image |
|
AutoStepheight |
Contrast Enhancement |
|
Bearing |
Convolution |
|
Bearing Compare |
Detrend |
|
Bump Analysis |
Erase Scan Lines |
|
Depth |
Edge Enhance |
|
Grain Size |
Flatten |
|
Grain Size Average |
Gaussian |
|
Particle Analysis |
Geometric |
|
Power Spectral Density |
Highpass |
|
PSD Compare |
Invert |
|
Roughness |
Lowpass |
|
Section |
Median |
|
Stepheight |
Plane Fit Auto |
|
Auto Tip Qual |
Plane Fit Manual |
|
Width |
Resize |
|
Trench |
Rotate |
|
MFM Track Width |
Spectrum 2D |
|
Localized Depth |
Zoom |
