Digital Electronics Scanning Probe Microscope Specifications

Nanoscope IV Controller Dimension 310™ SPM Head

Sample Specifications

Max Sample Size

Wafers and disk media (8-inch dia. X 0.5" thick)

Inspectable Area

100mm X 125mm typical

Includes interchangeable adapters for centering hard disks and removable wafer locating pins. Vacuum pump included.

Small Samples

Magnetic holder available for mounting small samples on mounting pucks (< 15 mm dia. typ.).

Silicon Wafers

Silicon-dioxide-coated chuck accommodates 2-inch, 100, 125, 150, and 200 mm wafers

Wet Samples

Optional fluid cell allows immersion of microscope head to max depth of 7 mm.

Chuck Vacuum

The chuck vacuum pneumatics secure samples to the chuck using a separate toggle switch at the front of the stage control electronics box.

Scanner Tube Piezo Tube Specifications

Travel (approximate scan size)

x-axis

90 μm

y-axis

90 μm

z-axis

6 μm

Electronic Resolution

16-bit (all axes)

Orthogonality

2 degrees

Uncorrected Z bow

90 μm scan size

50nm

10 μm scan size

2 nm

Integrated zoom optical microscope's features include:

10x objective (long working distance)

2X TV camera tube

Motorized zoom system

410-1845 x magnification range with 13-inch monitor and corresponding field of view of 180-810 μm

Motorized focus

Through-the-lens illumination

Color Video Camera

Focus tracking and automated engagement

Noise- <0.5 ÅRMS in vertical (Z) dimension with acoustic/vibration isolation

Stage

Enhanced motorized positioning

125 x 100 mm inspectable area

2 μm resolution

3 μm repeatability unidirectional (10 μm max)

4 μm repeatability bidirectional for X-axis, 6 μm for Y-axis

Analysis Techniques Available

Analyze

Modify

Autocovariance

Clean Image

AutoStepheight

Contrast Enhancement

Bearing

Convolution

Bearing Compare

Detrend

Bump Analysis

Erase Scan Lines

Depth

Edge Enhance

Grain Size

Flatten

Grain Size Average

Gaussian

Particle Analysis

Geometric

Power Spectral Density

Highpass

PSD Compare

Invert

Roughness

Lowpass

Section

Median

Stepheight

Plane Fit Auto

Auto Tip Qual

Plane Fit Manual

Width

Resize

Trench

Rotate

MFM Track Width

Spectrum 2D

Localized Depth

Zoom