Phenom ProX Tabletop SEM with EDS

Relocated to W&M Campus, ISC3, Room 1223

Specifications  (from www.phenom-world.com)                                            Phenom

Spec Sheet

System:

  • Imaging module, 19” touch-screen monitor, rotary knob, mouse, diaphragm vacuum pump, power supply, USB flash drive
  • Elemental Mapping and Line Scan: Reveals distribution of elements within the sample, fully integrated Energy Dispersive Spectrometer(EDS)

Imaging Modes:

  • Light Optical Magnification: 20 to 135x
  • Electron Optical Magnification range: 80 - 130,000x, Digital zoom: max. 12x

Illumination:

  • Light Optical: Bright field/Dark field modes
  •  Electron Optical: Long lifetime thermionic source, low, imaging spot analysis and mapping mode, beam currents selection
  • Accelleration Voltages: Default: 5 kV, 10 kV and 15 kV, Advanced Mode: Adjustable range between 4.8 kV and 15 kV imaging and analysis mode
  • Resolution: less than or equal to 10 nm

Digital Image Detection

  • Light Optical: Color Navigation Camera
  • Electron Optical: High sensitivity backscattered electron detector (compositional and topographical modes)

Image Format: JPEG, TIFF, BMP

Image Resolution: Options 456 x 456, 684 x 684, 1024 x 1024 and 2048 x 2048 pixels

Data Storage: USB Flash drive, network and ProSuite PC

Sample Stage: Computer-controlled motorized X and Y

Sample Size: Up to 32 mm (dia) and up to 100 mm (h)

Sample Loading Time

  • Light Optical < 5 s
  • E lectron Optical < 30 s

Dimensions & Weight

  • Imaging Module 286 (w) x 566 (d) x 495 (h) mm, 50 kg
  • Diaphragm Vacuum Pump 145 (w) x 220 (d) x 213 (h) mm, 4.5 kg
  • Power Supply 156 (w) x 300 (d) x 74 (h) mm, 3 kg
  • Monitor 375 (w) x 203 (d) x 395 (h) mm, 7.9 kg
  • Standard ProSuite Sysyem including 19" monitior with PC and network router mounted, 375(w) x 250(d) x 395(h) mm, 9 kg

EDS Spefications

  • Detector Type: Silicon Drift Detector (SDD)
  • Detector Active Area: 25 mm sq.
  • X-ray Window: Ultra thin Silicon Nitride window allowing detection of elements B to Am
  • Energy Resolution: Less than or equal to 135 eV
  • Processing Capabilities: Multi-channel analyzer with 2048 chanels at 10 eV/ch
  • Max. Input Count Rate: 300,000 cps
  • Hardware Integration: Fully embedded
  • Software: Integrated in Phenom ProSuite, integrated column and stage control, auto-peak ID, Iterative strip peak deconolution, confidence of analysis indicator, export functions CVS, JPG, TIFF, ELID,EMSA
  • Report: Docx format

Ambient Conditions

  • Temperature 15°C ~ 30°C (59°F ~ 86°F)
  •  Humidity < 80 % RH
  • Power Single-phase AC 110 - 240 Volt, 50/60 Hz, 300 W (max.)

Recommended Table Size 150 x 75 cm, load rating of 100 kg