Dektak 3 ST Surface Profiler - Measuring System

The Dektak3ST is a surface profiling system capable of measuring surface textures and variations in the submicro-inch range to a sample thickness of 131 microns. By way of a diamond-tipped stylus, samples are analyzed under it on a moving stage according to parameters set by the user (scan length and time). As the stylus traverses the pre-determined length of the sample surface, surface variations are recorded. The data recorded can then be analyzed (up to 30 functions per scan) depending on user interests. These parameter capabilities include: roughness, waviness, step height and geometry (area, radius, slope, etc.). The graphic screen display exhibits data plot and live video imaging.

dt1

Fig. 1: Profile of 46.250 KÂ NIST Certified Calibration Standard.

Table 1: Functions and Purpose
R (reference) cursor Software leveling, analytical functions
M (measurement) cursor Software leveling, analytical functions
Vertical Delta Vertical difference between which R and M cursors intercept profile trace
Horizontal Delta Horizontal difference between two cursors

 

dt2

dt3

Fig. 4: The user may choose analytical or geometric functions
of interest to be calculated into the scan.

Analytical functions

Fig. 4: The user may choose analytical or geometric functions of interest to be calculated into the scan.

Fig. 4: The user may choose analytical or geometric functions of interest to be calculated into the scan.

Table 2: Analytical and Geometric Functions
Category
Function
Calculation
Roughness
Ra
Arithmetic Average Roughness
Height
ASH
Difference between two average heights
Waviness
Wa
Arithmetic Average of Waviness
Geometry
Area
Area of a profile between R and M cursors