M44 Variable Angle Spectroscopic Ellipsometer

Ellipsometry is a technique used to characterize optical properties and thicknesses of thin films by measuring the change in polarization state of light reflected from the surface of (or through) a sample.

Calculations are carried out by using physical models of specified layered structures to simulate the interaction of polarized light on the sample.

Available Model Layer Types include:
  • Alloy
  • Temp
  • Cauchy
  • Lorentz Oscillator
  • Graded
  • Anisotropic
  • Kramers-Kronig
  • Delay
  • Virtual Interface
  • Surface Roughness

Xenon lamp source provides continuous spectral range of 220-2000 nm, with sharp lines between 800 and 900 nm, allowing for a thin film thickness measurement range of about 5-1000 nm

Available configurations:
  • Ex-situ
  • In-situ

Ex-Situ Operating Instructions (pdf)

Tutorial for Ellisometry: https://www.jawoollam.com/resources/ellipsometry-tutorial